Depiction of the MEMS resonator (simplified from original), showing the overall geometry. Image licensed by the authors under the Creative Commons Attribution - NonCommercial - Share Alike 3.0 Unported License.
Their model resonator, as shown in the figure, was fabricated from a piezoelectric GaAs/AlGaAs heterojunction. The resonator beam is clamped at both ends, and it has dimensions 260, 84, and 1.35 μm. The oscillation mode is out of plane. The fundamental resonant frequency was 155,702 Hz, and the quality factor, Q = 140,000, puts it into the same class as a good quartz crystal. Unfortunately for potential applications of this approach, the resonator was held at a temperature of 3 K.
As a simple example of the resonator operation, we can represent two binary inputs, as follows:
A: fA = 2 f0 + Δwhere fA and fB are frequencies corresponding to A and B that are applied to the resonator, f0 is the resonant frequency of the beam, and Δ is a fixed detuning frequency. The beam will resonant when excited by the second harmonic signal, 2 f0, but not when it's detuned. Thus, the presence of A or B alone will not excite resonance, but a combination of A and B will. In this case, the device acts as an AND gate. One interesting thing that the authors point out is that computers began as mechanical devices, and now computing has dipped back into its mechanical roots.
B: fB = 2 f0 - Δ
![]() | An example of mechanical computing. A portion of Charles Babbage's difference engine. Source: Harper's new monthly magazine, vol. 30, no. 175 (December 1864), p.34. (Via Wikimedia Commons) |