A tuning fork gyroscope. Fig. 7 of US Patent No. 5,396,144 (Piyush K. Gupta and Craig E. Jenson, "Rotation rate sensor with center mounted tuning fork," Mar 7, 1995; see Ref. 6.)
Most such MEMs gyroscopes are variants of a tuning fork. When a tuning fork rotates, the Coriolis forces on the vibrating tines will cause a torsional force at the base of the tuning fork that's easy to detect. The force is proportional to the angular rate. An example of an early implementation is shown in the above figure.[6] As you can see, turning a tuning fork into a useful angular rate sensor is somewhat difficult.
What would be especially desirable is a device that gives an orientation angle directly - A Foucault pendulum on a chip. Andrei M. Shkel, professor of mechanical and aerospace engineering at the University of California (Irvine), patented a Foucault concept in a MEMs device in 2002.[7] Shkel and his associates at the UC Irvine MicroSystems Laboratory have been improving this concept. The basic principle of such a gyroscope is shown in the figure below from Shkel's 2002 patent.[7]
A MEMs gyroscope inspired by the Foucault pendulum. Fig. 1 of US Patent No. 6,481,285 (Andrei M. Shkel and Roger T. Howe, "Micro-machined angle-measuring gyroscope," November 19, 2002; see Ref. 7.)
With reference to the figure, a large central mass (106) is held in place by springs or flextures (108) so that it's free to move in any direction in a plane. The suspension is isotropic; that is, it has uniform stiffness in all directions in the gyroscope's plane, just as in a Foucault pendulum. Once the mass is driven to vibrate in a direction, it will continue to vibrate in that direction, even when the chip is rotated. The various sensors and actuators determine the direction of motion and apply a small driving force to keep the mass oscillating.
It all seems so simple; but, as usual, the devil is in the details, and it's difficult to fabricate such a device. Shkel, along with Igor P. Prikhodko, Sergei A. Zotov and Alexander A. Trusov of the UC Irvine MicroSystems Laboratory have presented a different Foucault pendulum architecture at The 24th International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico.[8-11] As shown in the figure, the design has not one, but four proof masses. this quadrupole version of a Foucault pendulum consists of four symmetrically vibrating tines that are synchronized by anti-phase levers.
Igor P. Prikhodko, Sergei A. Zotov, Alexander A. Trusov, and Andrei M. Shkel, "Foucault Pendulum On A Chip: Angle Measuring Silicon Mems Gyroscope," MEMS 2011, Cancun, MEXICO, January 23-27, 2011 (To be published).
Because of the symmetry, the vibrational modes in the "X" and "Y" directions are degenerate; that is, they occur at the same frequency. The rotation angle is given by the simple equation,
Θ = arctan(||y||/||x||)where x and y are the displacement components. Experimental characterization of this device confirmed linearity in excess of ±450°/sec.